Analysis of Process Influence Factor of Sol and Characterization of TiO2 Thin Film

作者：Lv Kaiyun^*; Xu Wenyuan

来源：Rare Metal Materials and Engineering, 2009, 38: 594-597.

• TiO2
• sol
• stability
• viscosity
• film

As the key index of the sol quality, the stability can be characterized by the viscosity of sols. Nano TiO2 thin film was prepared by sol-gol method from tetrabutyl titanate, absolute alcohol, acetylacetone and glacial acetic acid and the viscosity change of sols were tracked and measured. The sols possessing suitable and stabilizing viscosity were fit to prepare the high-quality films. The relationship between ratios of each components and the stability of sols were discussed. The results indicated that the principal factors influencing the gel time and the sol viscosity were the dosage of absolute alcohol, acetylacetone, deionized water and glacial acetic acid. The optimal ratio to prepare the sots possessing suitable and stabilizing viscosity was as as follows: n(tetrabutyl titanate): n(absolute alcohol): n(deionized water): n(acetylacetone): n(glacial acetic acid) = 1:30:3:1.5:1.5 ( mol ratio). The film sample was characterized by SEM, UV-vis and XRD.

• 出版日期2009-12
• 单位东华理工大学