Multiple-output MEMS DC/DC converter: a system modeling study

作者：Chaehoi A; Begbie M; Weiland D; Chew Z J; Li L^*

来源：Microsystem Technologies, 2012, 18(11): 1801-1806.

DOI：10.1007/s00542-012-1549-2

DC/DC converters are widely used in consumer electronic devices where usually a single power source is available while the electronic board of the device requires different voltage levels in order to power-up different block functions. In this paper we present the design of a MEMS single-input multi-output voltage level shifter. The low-voltage to high-voltage conversion is based on the electrostatic transduction of variable capacitors built using interdigitated comb fingers. A 1 mm 2 MEMS prototype has been designed and fabricated using the SOIMUMPs process. In this study we present the co-design and co-simulation of the whole system (the MEMS device and its dedicated charge-pump-circuit) in a single EDA environment through MEMS? (a Coventorware (R) tool that allows the co-simulation of MEMS and electronics in the Cadence Analog Design Environment). We present analytical, FEM and MEMS+ models of the multi-output DC-DC converter and show that all our models converge towards the experimental results.

• 出版日期2012-11