A study of synthesis of LiCoO2 thin films by sol-gel method

作者:Huang ZF; Wei YJ; Liu W; Xu XG; Wang CZ; Meng X; Chen G*
来源:Chemical Journal of Chinese Universities, 2004, 25(5): 810-813.

摘要

Layered LiCoO2 thin films were synthesized on the substrates of monocrystalline silicon(111) wafers by sol-gel and spin-coating methods. LiNO3 and Co(NO3)(2) were used as raw materials. XRD results show that the total concentration of metal ions(Li+ +Co2+) and the metal atomic ratio n(Li)/n(Co) in the coating solution can affect the composition in the films severely, and the best annealing temperature and time are between 600-700 degreesC and 30-60 min, respectively. Meanwhile, the contents of PEG, citric acid and deionized water in the coating solution and the speed of rising temperature have influence on the surface morphologies of the films strongly.