科研之友
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摘要
A comprehensive computational model is developed to study the dynamics of electrostatically actuated micro-electro-mechanical system (MEMS) switches. The operation of the device involves a coupled interaction of structure response, fluid dynamics and electrostatics. A unified computational framework based on the finite volume method (FVM) is developed to account for these mechanisms. The coupling between the multiple physics is achieved by employing the immersed boundary method (IBM). This computational tool is applied to study the pull-in phenomena of a variety of MEMS devices, including fix-fix beam, cantilever and frog-leg.
- 出版日期2012
