摘要

A three-dimensional numerical model is developed using computational fluid dynamics software FLUENT v6.3.26 to investigate the influence of curved substrate on the plasma flow fields and subsequent in-flight particle behavior. The curved substrates have two different dimensional shapes and are positioned in two orientations (convex or concave). It is found that inclusion of the substrates with different shapes in different directions significantly affects the plasma flow fields at the vicinity of the substrate, although the most upstream region of the plasma field remains unaffected. Plasma temperature and velocity contours and flow vectors in the computational domain, especially at regions near substrates are presented. Investigations on the size effect on the in-flight particle parameters are carried out, which show that smaller particles tend to acquire higher velocities and temperatures. Moreover, smaller particles are more susceptible to the flow change by the substrate inclusion. However, for the size range of the zirconia feedstock we used later, there is no obvious effect of the substrate inclusion on the particle distribution on the substrate surface.

  • 出版日期2009-12
  • 单位南阳理工学院