An Insight into Grain Refinement Mechanism of Ultrananocrystalline Diamond Films Obtained by Direct Current Plasma-Assisted Chemical Vapor Deposition

作者：Lee Hak Joo; Cho Jung Min; Kim Inho; Lee Seung Cheol; Park Jong Keuk; Baik Young Joon; Lee Wook Seong^*

来源：Plasma Processes and Polymers, 2014, 11(5): 437-447.

DOI：10.1002/ppap.201300146

• chemical vapor deposition (CVD)
• DC plasmas
• electron stimulated desorptions
• grain refinement
• ultrananocrystalline diamond films

The grain-refinement mechanisms involved during the deposition of diamond films by direct-current plasma assisted chemical vapor deposition (DC-PACVD) were investigated as a function of the inter-electrode electric field (IEEF). As IEEF was increased from 260 to 940Vcm(-1), the local electron temperatures near the growth front increased strongly; as a result, a strong grain refinement occurred ultimately yielding ultrananocrystalline diamond films (UNCD). Such observations were attributed to novel features of the DC-PACVD, including the electron-stimulated desorption (ESD) of the hydrogen-terminated moieties located at the surface, and the consequently enhanced generation of bi-radical sites at the growing diamond surface.

• 出版日期2014-5