A Large Gap of Ar and Mixed Gas at Atmospheric Pressure RF-DBD Glow Discharges

作者：Li B^*; Chen Q; Liu Z; Wang Z

来源：3rd IEEE International Nanoelectronics Conference, 2010-01-03 to 2010-01-08.

In this study, a large gap of the distance between electrodes (> 5.5 mm) of Ar atmospheric pressure glow discharge (APGD) in radio frequency dielectric barrier discharges (RF-DBD) is achieved. The I-V characteristic and I-phase angle characteristic of RF-DBD are studied in detail. The discharge characteristic of Ar mixed with N(2), O(2) and Air, respectively, was diagnosed by the optical emission spectrum. The Lissajous plot was measured to calculate the effective power of the discharges. It is obtained that the mixture gas ratio in RF-DBD is seriously affected the discharge stability and the discharge mode. It concludes that this adjustable manufacture of the RF-DBD is capable in wide applications for material modifications and polymerizations.

• 出版日期2010
• 单位北京印刷学院