X-ray diffraction peaks from misfit dislocations in double- and triple-crystal diffractometry

作者：Kaganer Vladimir M^*; Shalimov Artem; Bak Misiuk Jadwiga; Ploog Klaus H

来源：Physica Status Solidi A-Applications and Materials Science, 2007, 204(8): 2561-2566.

DOI：10.1002/pssa.200675657

We propose a common description of the full widths at half maximum of X-ray diffraction peaks obtained in different scans of triple-crystal diffractometry and as well as for glancing incidence and glancing exit double-crystal measurements. Calculations are compared with measurements of GaAs/Si(001) heteroepitaxial films. We show that the diffraction peak broadening is entirely due to random 60 degrees misfit dislocations that provide only a minor part of the misfit relaxation. The remaining relaxation is due to periodic edge misfit dislocations that do not contribute to the peak broadening.

• 出版日期2007-8