Development of a Built-In Micro-Laser Doppler Velocimeter

作者：Morita Nobutomo^*; Nogami Hirofumi^*; Higurashi Eiji^*; Ito Takahiro^*; Sawada Renshi^*

来源：Journal of Microelectromechanical Systems, 2016, 25(2): 380-387.

DOI：10.1109/JMEMS.2016.2518691

• Laser Doppler velocimetry
• micro optical sensor
• velocity sensor

Our research group previously developed an integrated micro-laser Doppler velocimeter only 2.8 x 2.8 mm in area and 1-mm thick by minimizing a number of components with multifunctional parts, such as a glass cover with lenses for hermetic sealing and laser collimation, a silicon base for casing, a mirror mount, a laser diode bench, and others. In this paper, by applying a fast Fourier transform analysis to the sensor output, we successfully measured the velocities of plastic, paper, and aluminum objects over a wide velocity range, from 10 mu m/s to 10 mm/s, within a 3.3% measurement error, without attaching any scale to the measurement target. We also verified feasible measurement distances for each object and examined how tilt installation error affected the measurements. [2015-0111]

• 出版日期2016-4