Development of Reference Standards for the Calibration of Optical Systems Used in the Measurement of Microcomponents

作者：Pedrini G^*; Gaspar J; Osten W; Paul O

来源：Strain, 2010, 46(1): 79-88.

DOI：10.1111/j.1475-1305.2008.00603.x

• calibration
• displacement measurement
• interferometry
• MEMS

Optical techniques are well suited for the measurement of microcomponents but give accurate results only when calibrated systems are used. This paper presents the development of a standard reference device whose in-plane displacement is precisely reproducible when submitted to standard loadings. The reference device has been manufactured and tested by optical measuring systems. This reference device is to be used for the calibration of optical measuring systems in the future.

• 出版日期2010-2