Al (110) surface oxide thermal stability in ultrahigh vacuum

作者：Cai Minzhen; Outlaw Ronald A^*; Butler Sue M; Miller John R

来源：Surface and Interface Analysis, 2013, 45(11-12): 1769-1774.

DOI：10.1002/sia.5320

• aluminum oxide
• UHV
• CO desorption
• surface oxide thermal stability

This research characterizes the stability of the Al2O3 surface oxide on Al (110) as a function of temperature and within an ultrahigh vacuum environment (p%26lt;5x10(-12)Torr). Auger electron spectroscopy and temperature desorption spectroscopy were used to correlate the change in oxygen and carbon surface concentration. The surface oxide was observed to remain stable up to 350-400 degrees C. Above this temperature, the oxide began to dissociate resulting in a CO desorption peak at 425 degrees C followed by extensive dissolution of the C and O into the Al bulk. A second and much smaller CO desorption peak was observed at 590 degrees C in concert with complete oxide breakdown and the virtual disappearance of surface carbon and oxygen. Extrapolation of the Auger electron spectral ratios of C-KLL and O-KLL peaks to the sum of the Al-LVV(0) and Al-LVV(3+) peak suggests that the surface concentration of each approaches zero at similar to 640 degrees C. The predominant mechanism for reduction of the surface oxide occurs by dissolution into the bulk instead of desorption.

• 出版日期2013-11