Dense and smooth amorphous films of multicomponent FeCoNiCuVZrAl high-entropy alloy deposited by direct current magnetron sputtering

作者：Liu, L.; Zhu, J. B.; Hou, C.; Li, J. C.^*; Jiang, Q.

来源：Materials and Design, 2013, 46: 675-679.

DOI：10.1016/j.matdes.2012.11.001

• MECHANICAL-PROPERTIES
• NITRIDE FILMS
• WEAR BEHAVIOR
• MICROSTRUCTURE
• COATINGS
• RESISTANCE
• STABILITY
• ELEMENTS
• SI

The multicomponent amorphous nitride films of FeCoNiCuVZrAl high-entropy alloy were deposited by direct current magnetron sputtering in the mixture atmosphere of Ar and N-2. The systematical investigations demonstrate that the chemical composition, microstructure, and mechanical properties of the amorphous films intimately rely on the concentration of N-2 in the atmosphere mixture. When N-2 flow ratio increases from 0% to 50%, the thickness of the films decreases, whereas the roughness firstly decreases and then increases. At the N-2 flow ratio of 30%, a perfect dense and smooth amorphous nitride film could be achieved. While the hardness and Young's modulus of the film reach the maximum values of 12 and 166 GPa, respectively.

• 出版日期2013-4
• 单位吉林大学