摘要

The carbon nanotubes (CNTs) film was prepared on Si substrate by electrophoretic deposition (EPD) and treated by Ar microwave plasma. The microstructure and field emission properties of the as-prepared CNTs films before and after treatment were investigated. High-resolution transmission electron microscope (HRTEM) and Raman spectroscope reveal the microstructural changes of CNTs after the plasma treatment as evidence of the appearance of a large amount of structural defects, the sticking with nanometer size and " needle-like " tips. The field emission measurements indicate that the turn on electric field is increased slightly after treatment. The sample treated by Ar plasma for 10min shows the best field emission J - E property. Compared to that of untreated sample, the threshold field of the CNTs film treated for 10min decreases from 3.12V/mu m to 2.54V/mu m. And after plasma treatment, the emission current density at applied electric field of 3.3V/mu m increase from 18.4mA/cm(2) to 60.7mA/cm(2). The mechanism of variation of field emission properties after plasma treatment is discussed.