Analytical Modeling and Simulation for Dual Metal Gate Stack Architecture (DMGSA) Cylindrical/Surrounded Gate MOSFET

作者：Ghosh Pujarini^*; Haldar Subhasis; Gupta R S; Gupta Mridula

来源：Journal of Semiconductor Technology and Science, 2012, 12(4): 458-466.

DOI：10.5573/JSTS.2012.12.4.458

• Dual metal gate stack architecture (DMGSA)
• surrounded/cylindrical gate MOSFET (CGT/SGT)
• short channel effects (SCEs)

A Dual metal gate stack cylindrical/surrounded gate MOSFET (DMGSA CGT/SGT MOSFET) has been proposed and an analytical model has been developed to examine the impact of this structure in suppressing short channel effects and in enhancing the device performance. It is demonstrated that incorporation of gate stack along with dual metal gate architecture results in improvement in short channel immunity. It is also examined that for DMGSA CGT/SGT the minimum surface potential in the channel reduces, resulting increase in electron velocity and thereby improving the carrier transport efficiency. Furthermore, the device has been analyzed at different bias point for both single material gate stack architecture (SMGSA) and dual material gate stack architecture (DMGSA) and found that DMGSA has superior characteristics as compared to SMGSA devices. The analytical results obtained from the proposed model agree well with the simulated results obtained from 3D ATLAS Device simulator.

• 出版日期2012-12