Selective growth of single phase VO2(A, B, and M) polymorph thin films

作者：Srivastava Amar; Rotella Helene; Saha Surajit; Pal Banabir; Kalon Gopinadhan; Mathew Sinu; Motapothula Mallikarjuna; Dykas Michal; Yang Ping; Okunishi Eiji; Sarma D D; Venkatesan T^*

来源：APL Materials, 2015, 3(2): 026101.

DOI：10.1063/1.4906880

We demonstrate the growth of high quality single phase films of VO2(A, B, and M) on SrTiO3 substrate by controlling the vanadium arrival rate (laser frequency) and oxidation of the V atoms. A phase diagram has been developed (oxygen pressure versus laser frequency) for various phases of VO2 and their electronic properties are investigated. VO2(A) phase is insulating VO2(B) phase is semi-metallic, and VO2(M) phase exhibits a metal-insulator transition, corroborated by photoelectron spectroscopic studies. The ability to control the growth of various polymorphs opens up the possibility for novel (hetero) structures promising new device functionalities.

• 出版日期2015-2