New simple optical sensor: From nanometer resolution to centimeter displacement range

作者：Missoffe A; Chassagne L^*; Topcu S; Ruaux P; Cagneau B; Alayli Y

来源：Sensors and Actuators A: Physical , 2012, 176: 46-52.

DOI：10.1016/j.sna.2012.01.007

• High resolution sensor
• Nanodisplacement
• Distance measurement
• Low-noise electronics
• Photodetector

A very simple displacement sensor is presented with nanometric resolution over centimetric travel range. The compact system is composed of a laser-diode module and a photodiode array leading to a non-contact sensor. With a corner cube configuration, it is not sensitive to most of main mechanical defects of the mobile platform. The use of an optical fiber and a normalization process inspired from classical four-quadrant detectors allows high repeatability and minimal drifts. This paper exposes the setup, simulations and experimental results. Several displacements over millimeters range with a resolution of 1.2 nm sustain the simulations.

• 出版日期2012-4