科研之友
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摘要
SiC crystal is usually got by physical vapor transport (PVT) method in the lab. In this paper, a field-coordination theory was involved to optimize the SiC PVT growth system. We changed the parameters in the graphite crucible and calculated the flow field as well as species concentration field before and after optimization, using a finite volume-based software package developed by ourselves. We improved the design by analyzing the numerical results and the success ratio of SiC PVT experiment had increased from 30% to 90%.
- 出版日期2011
