Active Disturbance Rejection Control of a 2D MEMS Micromirror with Sidewall Electrodes

作者：Liu P.; Sun W.; Sun Z.

来源：Unmanned Systems, 2016, 4(1): 35-40.

DOI：10.1142/S2301385016400045

• Extended state observer
• microelectromechanical system
• micromirror

This study proposes the active disturbance rejection control (ADRC) for a second degree of freedom (2D) electrostatic torsional micromirror with sidewall electrodes. The main idea is to use the linear extended state observer (LESO) to estimate the external disturbance and the angular velocity of the micromirror, and a feedback controller is further applied to achieve the position control of the micromirror. The effectiveness of the LESO in the estimation of the external disturbance and angular velocity is demonstrated. The proposed novel control scheme provides the micromirror with high positioning accuracy and disturbance rejection.

• 出版日期2016
• 单位中国科学院数学与系统科学研究院; 华南理工大学