An improved dynamic model of tuning fork probe for scanning probe microscopy

作者：Ng B P; Zhang Y^*; Kok S W; Soh Y C

来源：Journal of Microscopy, 2009, 234(2): 191-195.

DOI：10.1111/j.1365-2818.2009.03160.x

• Dynamic modeling
• scanning probe microscopy
• system identification
• tuning fork probe

This paper presents a two coupled oscillators model to describe the dynamics of a tuning fork with a probe attached. The two coupled oscillators are unbalanced only in their effective masses and the damping ratios. By applying a frequency domain system identification approach in experimental investigation of various probe attachment cases, a good accuracy of the model is demonstrated. The effectiveness of the model is further demonstrated in quantitative analysis of the noise performance and the sensitivity of force sensing with a tuning fork probe. Compared with existing models, the proposed model can more accurately characterize the dynamics of a tuning fork probe.

• 出版日期2009-5
• 单位南阳理工学院