Acid etching process for fabrication of Bi2Sr2CaCu2O8-x stack

作者：Zhang Jie^*; Chen Jian; Wu JingBo; Kang Lin; Xu WeiWei; Wu PeiHeng

来源：Chinese Science Bulletin, 2007, 52(3): 303-306.

DOI：10.1007/s11434-007-0064-9

• acid etching process
• intrinsic Josephson junction
• concentration
• four-terminal measurement

We adopted a new method, acid etching process, to fabricate the intrinsic Josephson junctions based on the Bi2Sr2CaCu2O8=x single crystals. By soaking the crystals into the dilute hydrochloric acid, we fabricated a junction stack successfully, and meantime made the surrounding area insulated. A certain concentration of hydrochloric acid was used to maintain the roughness of the modified layer. The current-voltage characteristic was achieved through the four terminal measurement. We could control the junctions' number by changing the concentration and the soaking time. We also found that the thickness of the stack was equal to the average height of the insulation layer. Such a simple, convenient and controllable fabrication method with a high yield might widen the applications of the intrinsic Josephson junctions.

• 出版日期2007-2
• 单位南京大学