Au-assisted Co silicide island growth on Si(111)

作者：Fleurence A^*; Agnus G; Maroutian T; Bartenlian B; Beauvillain P

来源：Applied Surface Science, 2012, 258(24): 9675-9679.

DOI：10.1016/j.apsusc.2012.06.008

• Co silicide nanostructures
• Solid phase reaction
• Au-Si islands
• Self-organization

Based on a local study by means of scanning tunneling microscopy, we demonstrate that a small amount of Au grown on Si(1 1 1) either as Au-induced surface reconstruction or Au-rich islands, promotes dramatically the growth of Co silicide islands by solid phase reaction. We identified an outdiffusion of Si atoms from the substrate, induced by the Au-rich islands and limited to their vicinity, which results in a strong decrease of the formation temperature of the silicide islands.

• 出版日期2012-10-1