Note: A compact microwave plasma enhanced chemical vapor deposition based on a household microwave oven

作者：Pang, Fei^*

来源：Review of Scientific Instruments, 2018, 89(8): 086104.

DOI：10.1063/1.5040699

• RAPID SYNTHESIS
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I designed an efficient and compact microwave plasma enhanced chemical vapor deposition (MW-PECVD) based on a household 2.45 GHz microwave oven. In the MW-PECVD, the microwave plasma was sparked by a piece of Cu foil in a lowpressure down to 1 Pa. The SiC plate is not only used to realize rapid microwave heating-up but also to prevent the reflected power from damaging the magnetron. To test the performance of the system, vertically oriented graphene nanosheets were fabricated on the Cu foil. The products were characterized by Raman spectra and scanning electron microscope. Published by AIP Publishing.

• 出版日期2018-8
• 单位中国人民大学