Mechanical properties of sputter-deposited nanocrystalline Cr3Si film

作者：Xu Jiang^*; Sun Jian; Jiang Shuyun

来源：Materials Letters, 2009, 63(12): 1082-1084.

DOI：10.1016/j.matlet.2009.02.025

• Thin films
• Mechanical properties
• Nanomaterials
• Intermetallic alloys and compounds

The sputter-deposited Cr-Si film prepared by glow discharge was comprised of equiaxed nanocrystalline Cr3Si with a grain size of less than 5 nm. The hardness of the nanocrystalline Cr3Si film was 2.37 times higher than that of coarse-grained Cr3Si, whereas the elastic modulus of nanocrystalline Cr3Si was equal to that of coarse-grained Cr3Si. Compared with the coarse grain of Cr3Si, the sputter-deposited nanocrystalline Cr3Si film exhibited higher ductility or toughness due to the GB-mediated deformation.

• 出版日期2009-5-15
• 单位南京航空航天大学; 东南大学