Method for designing phase-calculation algorithms for two-dimensional grating phase-shifting interferometry

作者：Zhu Yucong^*; Odate Satoru; Sugaya Ayako; Otaki Katsura; Sugisaki Katsumi; Koike Chiaki; Koike Tetsuya; Uchikawa Kiyoshi

来源：Applied Optics, 2011, 50(18): 2815-2822.

DOI：10.1364/AO.50.002815

We propose a design method of phase-analysis algorithms based on two-dimensional grating phase shifting for Talbot interferometry, Talbot-Lau imaging, or the Ronchi test. These algorithms are designed to separate the two orthogonal shearing wavefronts and eliminate error effects of unwanted diffraction orders, simultaneously. Taking the effect of multidiffraction into account, moving the two-dimensional grating along a certain pass leads to a series of phase-shifted interfrograms, from which two orthogonal shearing wavefronts are derived, for the tested wavefront to be retrieved. The designing process is demonstrated, and the residual errors are analyzed via simulation works and experimental comparison.

• 出版日期2011-6-20