Negligible substrate clamping effect on piezoelectric response in (111)-epitaxial tetragonal Pb(Zr, Ti)O-3 films

作者：Yamada Tomoaki^*; Yasumoto Jun; Ito Daisuke; Sakata Osami; Imai Yasuhiko; Kiguchi Takanori; Shiraishi Takahisa; Shimizu Takao; Funakubo Hiroshi; Yoshino Masahito; Nagasaki Takanori

来源：Journal of Applied Physics, 2015, 118(7): 072012.

DOI：10.1063/1.4927810

The converse piezoelectric responses of (111)- and (001)-epitaxial tetragonal Pb(Zr0.35Ti0.65)O-3 [PZT] films were compared to investigate the orientation dependence of the substrate clamping effect. Synchrotron X-ray diffraction (XRD) and piezoelectric force microscopy revealed that the as-grown (111)-PZT film has a polydomain structure with normal twin boundaries that are changed by the poling process to inclined boundaries, as predicted by Romanov et al. [Phys. Status Solidi A 172, 225 (1999)]. Time-resolved synchrotron XRD under bias voltage showed the negligible impact of substrate clamping on the piezoelectric response in the (111)-PZT film, unlike the case for (001)-PZT film. The origin of the negligible clamping effect in the (111)-PZT film is discussed from the viewpoint of the elastic properties and the compensation of lattice distortion between neighboring domains.

• 出版日期2015-8-21