科研之友
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摘要
Atomic force microscopy (AFM) is a powerful imaging tool with high-resolution imaging capability. AFM probes consist of a very sharp tip at the end of a silicon cantilever that can respond to surface artefacts to produce an image of the topography or surface features. They are intrinsically passive devices. For imaging soft biological samples, and also for samples in liquid, it is essential to control the AFM tip position, both statically and dynamically, and this is not possible using external actuators mounted on the AFM chip. AFM cantilevers have been fabricated using silicon micromachining to incorporate a piezoelectric thin film actuator for precise control. The piezoelectric thin films have been fully characterized to determine their actuation performance and to characterize the operation of the integrated device. Examples of the spatial and vertical response are presented to illustrate their imaging capability. For operation in a liquid environment, the dynamic behaviour has been modelled and verified experimentally. The optimal drive conditions for the cantilever, along with their dynamic response, including frequency and phase in air and water, are presented.
- 出版日期2010-8
