科研之友
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摘要
A novel differential Michelson laser interferometer is proposed to eliminate the influence of environmental fluctuations for nanometer displacement measurement. This differential interferometer consists of two homodyne interferometers in which two orthogonal single frequency beams share common reference arm and partial measurement arm. By modulating the displacement of the common reference arm with a piezoelectric transducer, the commonmode displacement drift resulting from the environmental disturbances can be well suppressed and the measured displacement as differential-mode displacement signal is achieved. In addition, a phase difference compensation method is proposed for accurately determining the phase difference between interference signals by correcting the time interval according to the average speed in one cycle of interference signal. The nanometer displacement measurement experiments were performed to demonstrate the effectiveness and feasibility of the proposed interferometer and show that precision displacement measurement with standard deviation less than 1 nm has been achieved.
- 出版日期2017-4
- 单位浙江理工大学
