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摘要
There are three important parameters in the DC glow discharge process, the discharge current, discharge voltage and argon pressure in discharge source. These parameters influence each other during glow discharge process. This paper presents an automatic control system for DC glow discharge plasma source. This system collects and controls discharge voltage automatically by adjusting discharge source pressure while the discharge current is constant in the glow discharge process. The design concept, circuit principle and control program of this automatic control system are described. The accuracy is improved by this automatic control system with the method of reducing the complex operations and manual control errors. This system enhances the control accuracy of glow discharge voltage, and reduces the time to reach discharge voltage stability. The glow discharge voltage stability test results with automatic control system are provided as well, the accuracy with automatic control system is better than 1% FS which is improved from 4%FS by manual control. Time to reach discharge voltage stability has been shortened to within 30 s by automatic control from more than 90 s by manual control. Standard samples like middle-low alloy steel and tin bronze have been tested by this automatic control system. The concentration analysis precision has been significantly improved. The RSDs of all the test result are better than 3. 5%. In middle-low alloy steel standard sample, the RSD range of concentration test result of Ti, Co and Mn elements is reduced from 3. 0%similar to 4. 3% by manual control to 1. 7%similar to 2. 4% by automatic control, and that for S and Mo is also reduced from 5. 2%similar to 5. 9% to 3. 3%similar to 3. 5%. In tin bronze standard sample, the RSD range of Sn, Zn and Al elements is reduced from 2. 6% similar to 4. 4% to 1. 0%similar to 2. 4%, and that for Si, Ni and Fe is reduced from 6. 6%3 similar to 13. 9% to 2. 6%similar to 3. 5%. The test data is also shown in this paper.
