Size-Dependent UV Photosensitivity of Indium Zinc Oxide

作者:Heo Young Woo; Pearton S J; Norton D P*
来源:Journal of Nanoelectronics and Optoelectronics, 2010, 5(2): 143-146.
DOI:10.1166/jno.2010.1081

摘要

We investigated the photosensitivity of indium zinc oxide (IZO) stripe structures that had different widths from 50 nm to 4 mu m and the same thickness of 50 nm deposited by RF magnetron sputtering. The distance of two Ti/Au Ohmic electrodes along the IZO stripes was kept constant at 25 mu m. In the dark and under 365/254 nm UV illumination, the photosensitivity was measured in air. A very slow decay of the photoresponse was observed-a typical signature of surface states. Above the critical size of 80 nm, the photosensitivities of the indium zinc oxides were less than 1%. By sharp contrast, as the size of the indium zinc oxide stripes decreased from 80 nm to 50 nm, the photosensitivity of the indium zinc oxides increased from 1% to 16%. A significant increase of the photosensitivity at the size below a critical value of 80 nm was observed, which could be explained by the high surface-to-volume ratio and surface charge trapping effects.

  • 出版日期2010-8

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