Microstructure and soft magnetic properties of CoFeZrO thin films

作者：Lee K E; Ha N D; Sun D S; Kollu P; Kim C G; Kim C O^*

来源：Journal of Magnetism and Magnetic Materials, 2006, 304(1): E192-E194.

DOI：10.1016/j.jmmm.2006.01.158

• Nanogranular
• Soft magnetic thin films
• High-frequency thin films
• Microstructure

Nanogranular CoFeZrO thin films were successfully prepared by radio frequency reactive magnetron sputtering in O(2)/Ar atmosphere. The magnetic properties and microstructure were investigated. It is found that the Co(17.08)Fe(49.76)Zr(16.24)O(16.91) films show the best soft magnetic properties: magnetic coercivity of 0.3 Oe; anisotropy field of 44.9 Oe; saturation magnetization of 16.8 kG; electrical resistivity of 462.8 mu Omega cm. The effective permeability of the films reaches 800 and flattens up to 2 GHz.

• 出版日期2006-9