A curved electrode electrostatic actuator designed for large displacement and force in an underwater environment

作者：Preetham B S; Lake Melinda A; Hoelzle David J^*

来源：Journal of Micromechanics and Microengineering, 2017, 27(9): 095009.

DOI：10.1088/1361-6439/aa7a47

• curved electrode electrostatic actuator
• underwater actuator
• clamped-clamped beam
• static analysis
• microelectromechanical systems (MEMS)

There is a need for the development of large displacement (O (10(-6)) m) and force (O (10(-6)) N) electrostatic actuators with low actuation voltages (< +/- 8 V) for underwater bio-MEMS applications. In this paper, we present the design, fabrication, and characterization of a curved electrode electrostatic actuator in a clamped-clamped beam configuration meant to operate in an underwater environment. Our curved electrode actuator is unique in that it operates in a stable manner past the pull-in instability. Models based on the Rayleigh-Ritz method accurately predict the onset of static instability and the displacement versus voltage function, as validated by quasistatic experiments. We demonstrate that the actuator is capable of achieving a large peak-to-peak displacement of 19.5 mu m and force of 43 mu N for a low actuation voltage of less than +/- 8 V and is thus appropriate for underwater bio-MEMS applications.

• 出版日期2017-9