Dependence of the Au/SnOx/n-LTPS/glass thin film MOS Schottky diode CO gas sensing performances on operating temperature

作者：Juang Feng Renn; Fang Yean Kuen^*; Chiu Hung Yu

来源：Microelectronics Reliability, 2012, 52(2): 425-429.

DOI：10.1016/j.microrel.2011.10.002

The carbon monoxide (CO) gas sensing performances of Au/SnOx/n-LTPS MOS Schottky diode depending on operating temperature were studied systematically. The n-LIPS is the excimer laser annealed n-type low temperature polysilicon film on glass substrate. The Schottky diode has a nicely sensing ability to CO gas, especially under a higher operating temperature. For example under 200 degrees C and -3 V bias, the diode exhibits a high similar to 546% to 100 ppm CO ambient, which is better than the reported SnO2 based resistive type CO sensors of 100% and 37%, respectively on poly-alumina and glass substrates. Mechanisms of the higher temperature enhanced CO gas sensing performance were investigated and attributed to positive enthalpy (Delta H degrees) sensing reaction, temperature enhanced barrier height lowering (Delta Phi(B)) and different generation rates of O- and O-2(-) in elevated temperature.

• 出版日期2012-2