Nano fabrication of star structure for precision metrology developed by focused ion beam direct writing

作者：Xu Zongwei; Fang Fengzhou^*; Gao Haifeng; Zhu Yibo; Wu Wei; Weckenmann Albert

来源：CIRP Annals - Manufacturing Technology, 2012, 61(1): 511-514.

DOI：10.1016/j.cirp.2012.03.118

• Metrology
• Interferometry
• Ion beam machining (IBM)

The optimized design and nano fabrication of the star structures with continuous-variation spoke width are investigated in this study. Focused ion beam direct writing (FIBDW) technology is employed to fabricate the stars on various materials with an application-oriented design. The star center dimension and surface finish are minimized. The star structures with spoke%26apos;s width ranging from 25 nm to 16 p.m and step height from 1 nm to 1 mu m are achieved precisely. optical microscopy, scanning probe microscopy and scanning electronic microscopy are used to test their measurement capabilities based on the developed star structures in lateral and longitudinal directions, respectively.

• 出版日期2012
• 单位天津大学