摘要

The design and investigation of electronic micro systems oriented towards environmental and biological monitoring, requires more accurate PC-based simulation tools to predict and model properly the sensor characteristics. This paper describes a user-friendly platform allowing prediction of behaviors of chemical sensors based on semiconductor technology (EIS structure and ISFET) in order to optimize the geometry of micro-sensors. In addition, it enables the extraction of both microscopic and macroscopic parameters which define the sensor recognition properties.

  • 出版日期2011-12