Laminar and blazed type holographic gratings for a versatile soft x-ray spectrograph attached to an electron microscope and their evaluation in the 50-200 eV range

作者：Imazono Takashi^*; Koike Masato; Kawachi Tetsuya; Hasegawa Noboru; Koeda Masaru; Nagano Tetsuya; Sasai Hiroyuki; Oue Yuki; Yonezawa Zeno; Kuramoto Satoshi; Terauchi Masami; Takahashi Hideyuki; Handa Nobuo; Murano Takanori; Sano Kazuo

来源：Applied Optics, 2012, 51(13): 2351-2360.

DOI：10.1364/AO.51.002351

Laminar and blazed type holographic varied-line-spacing spherical gratings for use in a versatile soft x-ray flat-field spectrograph attached to an electron microscope are designed, fabricated, and evaluated. The absolute diffraction efficiencies of laminar (or blazed) master and replica gratings at 86.00 degrees incidence evaluated by synchrotron radiation show over 5% (or 8%) in the 50-200 eV range with the maxima of 22% (or 26%-27%). Also the resolving power evaluated by a laser produced plasma source is in excess of 700 at the energy near the K emission spectrum of lithium (similar to 55 eV) for all gratings. Moreover, the K emission spectrum of metallic Li with high spectral resolution is successfully observed with the spectrograph attached to a transmission electron microscope.

• 出版日期2012-5-1