Determination of the Anisotropy of Young%26apos;s Modulus Using a Coupled Microcantilever Array

作者：Choubey Bhaskar^*; Boyd Euan James; Armstrong Ian; Uttamchandani Deepak

来源：Journal of Microelectromechanical Systems, 2012, 21(5): 1252-1260.

DOI：10.1109/JMEMS.2012.2205137

• Anisotropy
• eigenvalues and eigenfunctions
• fabrication
• inverse problems
• microelectromechanical systems
• resonators
• Young%26apos
• s modulus

This paper reports a simple technique to measure the anisotropy of the Young%26apos;s modulus of MEMS materials using coupled cantilevers. The technique is demonstrated in single-crystal silicon with an array of cantilevers fabricated in (100) silicon following a %26quot;wagon wheel%26quot; configuration. The long axis of the cantilevers had different angular orientations to the [110] direction. The parasitic coupling due to undercut below the cantilevers, which is often observed during etching of MEMS, led to a collective behavior in the frequency response of the cantilevers. This collective behavior was used in association with an inverse eigenvalue analysis to obtain the Young%26apos;s moduli for the different orientations. Further analysis of the technique relating to accuracy and precision required in the resonance frequency measurement has also been presented.

• 出版日期2012-10