A patterning technique of lead zirconate titanate thin film by ultraviolet-light

作者：Wu Chia Che^*; Hsueh Chun Hung; Chang Ya Ting; Chang Chueh Tang; Chung Kuan Jung

来源：Microsystem Technologies, 2013, 19(6): 853-859.

DOI：10.1007/s00542-013-1750-y

The patterning technique of Pb(Zr, Ti)O-3 (PZT) thin film is an essential process in device fabrication processes for application in microsensors and microactuators. In this paper, a novel pattern technique is proposed for PZT thin film by UV photolysis processes. PZT thin films were first spin coated on the substrate and exposed by UV light for photolysis step. The UV photolysis step defined exposed and unexposed area by mask, and the pattern will be transferred to PZT thin film. After photolysis, PZT films were placed in non-ionic surfactant to remove unexposed area. Finally, PZT films were sintered at 650 A degrees C in the furnace for crystallization. Experimental results showed that remnant polarization of patterned PZT film by UV photolysis was 21.4 mu c cm(-2), which was compared to 17.24 mu c cm(-2) by hot plate prolysis. Coercive fields were 45 and 104 kV cm(-1) by UV photolysis and hot plate prolysis, respectively. Dielectric loss was 0.027 by UV photolysis which was much smaller than 0.043 by hot plate prolysis. PZT thin films patterned by UV photolysis showed satisfactory geometries.

• 出版日期2013-6