A facile route to patterned epitaxial ZnO nanostructures by soft lithography

作者:Richardson Jacob J; Estrada Daniel; DenBaars Steven P; Hawker Craig J; Campos Luis M*
来源:Journal of Materials Chemistry, 2011, 21(38): 14417-14419.
DOI:10.1039/c1jm13167b

摘要

Combining two robust, facile, and low cost techniques-nanoimprint lithography and low temperature aqueous solution phase epitaxy of ZnO-enabled the fabrication of nanostructured single crystal surfaces. Various patterns were fabricated with sub-micron resolution, including an array of 70 nm diameter posts. The method requires no vacuum equipment and has a maximum process temperature of 110 degrees C.

  • 出版日期2011