Preparation and characterisation of a-C and a-C:H coatings deposited by pulsed magnetron sputtering

作者：Czyzniewski Andrzej^*

来源：Surface and Coatings Technology, 2009, 203(8): 1027-1033.

DOI：10.1016/j.surfcoat.2008.09.027

• Amorphous carbon coatings
• Pulsed magnetron sputtering
• Raman scattering spectroscopy
• Scratch test
• Nano-indentation
• Ball on disc

The amorphous carbon coatings of a-C and a-C:H type were deposited by pulsed magnetron sputtering in argon and argon/acetylene atmosphere, respectively. The deposition rate, chemical composition, structure and mechanical properties of these coatings were studied as a function of acetylene flow rate. The adding of acetylene to working atmosphere caused increase of deposition rate and hydrogen content in coatings, and at the same time decrease in their hardness. The friction and wear behaviour of a-C and a-C:H coatings in ambient air are highly dependent on kind of counterparts material. The "true" friction coefficients of a-C and a-C:H coatings sliding against a-C and a-C:H coatings, respectively, are similar in values (0.06-0.08) and wear rates are similar too. Significantly higher friction coefficients (0.2-0.3) and wear rates were observed for both a-C and a-C:H coatings sliding against 100Cr6 steel. The lowest friction coefficients (0.02-0.04) and wear rates were obtained for a-C and a-C:H coatings sliding against Alumina counterpart.

• 出版日期2009-1-15