An investigation of accuracy, repeatability and reproducibility of laser micromachining systems

作者：Bhaduri Debajyoti^*; Penchev Pavel; Dimov Stefan; Soo Sein Leung

来源：Measurement, 2016, 88: 248-261.

DOI：10.1016/j.measurement.2016.03.033

• Laser micro machining
• Accuracy
• Repeatability
• Reproducibility
• Uncertainty
• Precision metrology

Component technologies of laser micro machining systems are key factors affecting their overall performance. The effects of these technologies on accuracy, repeatability and reproducibility (ARR) in different implementations of such systems have to be investigated to quantify their contributions to the overall processing uncertainty, especially those with the highest impact on beam delivery sub-systems. The aim of this research was to evaluate the capabilities of state-of-the-art machining platforms that were specially designed and implemented for laser micro structuring and texturing. An empirical comparative study was conducted to quantify the effects of key component technologies on ARR of four state-of-the-art systems. In particular, the capabilities of the optical and mechanical axes were investigated when they were utilised separately or in combination for precision laser machining. Conclusions are made about the positional accuracy of the mechanical and optical axes and the importance of their proper calibration on the systems' overall performance is discussed. It is shown that the laser machining platforms can achieve repeatability and reproducibility better than 2 mu m and 6 mu m, respectively.

• 出版日期2016-6