Pull-in parameters of cantilever type nanomechanical switches in presence of Casimir force

作者：Ramezani Asghar^*; Alasty Aria; Akbari Javad

来源：Nonlinear Analysis: Hybrid Systems , 2007, 1(3): 364-382.

DOI：10.1016/j.nahs.2006.10.011

• Nanomechanical switches
• Pull-in parameters
• Casimir force

In this paper, the effect of the Casimir force on pull-in parameters of cantilever type nanomechanical switches is investigated by using a distributed parameter model. In modeling of the electrostatic force, the fringing field effect is taken into account. The model is nonlinear due to the inherent nonlinearity of the Casimir and electrostatic forces. The nonlinear differential equation of the model is transformed into the integral form by using the Green's function of the cantilever beam. The integral equation is solved analytically by assuming an appropriate shape function for the beam deflection. The pull-in parameters of the switch are computed in three cases including nanoactuators without applied voltages, microswitches, and the general case of nanocantilevers. Nanoactuators without applied voltages are studied to determine the detachment length and the minimum initial gap of freestanding nanocantilevers, which are the basic design parameters for NEMS switches. The pull-in parameters of microswitches are investigated as a special case of our study by neglecting the Casimir effect and the results are verified through comparison with other works published in the literature. The general case of nanocantilevers is studied considering coexistence of the electrostatic and Casimir forces. The results of the distributed parameter model are compared with the lumped parameter model.

• 出版日期2007-9