Laser-Scan Lithography and Electrolytic Etching for Fabricating Meshed Pipes of Stainless Steel

作者：Takahashi Hiroshi; Horiuchi Toshiyuki^*

来源：Journal of Photopolymer Science and Technology, 2018, 31(1): 51-57.

DOI：10.2494/photopolymer.31.51

• Laser-scan lithography
• Slit pattern
• Electrolytic etching
• Stainless-steel pipe
• Meshed pipe

Numerous micro-slits were opened penetrating through fine stainless steel pipes using laser-scan lithography and electrolytic etching, and meshed pipes were fabricated. Such micro-fabrication technology will be useful for developing bio-medical micro-stents, syringe needles, mesh filters, and others. As original materials, stainless-steel pipes with an outer diameter of 100 mu m, a thickness of 20 mu m and a length of 40 mm were used. At first, each pipe coated with a positive resist was exposed to a beam spot of violet laser, and multi-slit patterns were delineated by scanning and intermittently moving the pipe in the axial and rotational directions. After the development, each pipe masked by the resist film except the slit pattern parts were etched individually. Electrolytic etching was applied by using an aqueous solution of NaNO3 and NH4Cl as an electrolyte. As a result, mesh structures composed of four linearly arrayed 22 slits arranged at every 90 degrees circumferential angle were fabricated.

• 出版日期2018