General analysis of microwave network scattering parameters for characterization of thin film materials

作者：Obrzut Jan^*

来源：Measurement, 2013, 46(8): 2963-2970.

DOI：10.1016/j.measurement.2013.04.049

• Scattering parameters
• Microwave networks
• Network model
• Coplanar waveguides
• Microwave conductivity
• Thin films

A general solution of the linear passive microwave network is presented for the characterization of thin film materials at high microwave frequencies. The mathematical formulas that correlate scattering parameters S-11 and S-21 with the distributed circuit parameters of the Z(0);Z(s);Z(0) network are given in closed form. The applicability of the general network model to the characterization of thin film materials is illustrated experimentally for one-port reflectometry in the coaxial configuration and for the two-port transmission reflection method in a coplanar waveguide configuration. Published by Elsevier Ltd.

• 出版日期2013-10