A LOW-NOISE SC-TYPE INTERFACE ASIC FOR A CLOSED-LOOP MEMS GYROSCOPE

作者：Liu Mingxing; Lu Wengao^*; Tao Tingting; Chu Hai; Li Xiaoliang; Chen Zhongjian; Zhang Yacong; Yan Guizhen

来源：IEEE International Conference on Solid-State and Integrated Circuit Technology, 2014-10-28 to 2014-10-31.

This paper presents a low-noise SC-type interface ASIC for a closed-loop MEMS vibratory gyroscope. An AC sensing method is employed to convert the amplitude-modulated capacitive signal to voltage signal. The interface CSA (charge sensitive amplifier) is followed by a CDS (correlated double sampling) circuit to reduce low frequency noise and eliminate offset. The system realizes a closed-loop control in the driving and sensing mode. The ASIC is fabricated in 0.18um CMOS process and occupies 2.9x1.7 mm(2).

• 出版日期2014
• 单位北京大学