A self-DLC coated cathode plasma source

作者：Deachana A^*; Boonyawan D; Yodsombat B

来源：Surface and Coatings Technology, 2009, 203(17-18): 2743-2746.

DOI：10.1016/j.surfcoat.2009.02.132

• DLC
• Aluminum cathode
• Microwave plasma source
• OES
• Raman spectroscopy
• RBS

A novel self-microwave plasma source modified by diamond-like carbon (DLC) coating self-cathode for density enhancement was devised. This simple method had been once routed for enhanced efficient microwave plasma with very low-cost. The coating parameters in fabrication of the self-coated DLC cathode for plasma density enhancement were investigated. DLC-Al cathodes coating by self cathode of microwave plasma source were fabricated to control and yielded strong non-activated emission. The novel cathodes showed enhancement of current density up to 240%. In addition, the contamination in the plasma source could be avoided with the new cathodes.

• 出版日期2009-6-15