A low cost micro-heater for aerosol generation applications

作者：Liu Guannan; Lowy Daniel A; Kahrim Amir; Wang Chao; Dilli Zeynep; Kratzmeier Nick; Zhao Wei; Peckerar Martin^*

来源：Microelectronic Engineering, 2014, 129: 46-52.

DOI：10.1016/j.mee.2014.07.011

• Microsystem
• Micro-heater
• Nickel plating
• Selective wet etch
• Gas sensor
• Aerosol inhale drug

A low cost micro-heater for aerosol generation has been developed using thin film deposition, electroless metal plating and selective wet etching technology. The thermal and electrical behavior of micro-heater (MH) and micro-hot-plate (MHP) systems is reported. The microstructure of the MH consists of a free standing amorphous silicon membrane with a thin film micro-heater (Cr/Ni layer) on top. The heating element is fabricated by e-beam evaporation and solution based nickel plating. The metal pattern temperature reaches the boiling point of glycerol (290 degrees C) and higher. A wet etched formed reservoir storage space for the aerosol source liquid can be placed alongside or underneath the hot plate. The entire MH unit is fabricated on a thin glass coverslip. This structure and the use of a plating bath and wet etch render the device remarkably low cost (less than 18 cent as compared to other silicon technology based heaters. This MH can be integrated with gas sensors to assist pre-heating to the working temperature. The chemical release cycles are well controlled and are ideally suitable for use in medical procedures, such as drug inhalation therapy.

• 出版日期2014-11-5