A low-temperature polycrystalline-silicon thin-film transistor micro-manipulation array with indium tin oxide micro-coils and real-time detection

作者：Chen Chih Yang^*; Huang Chien Yu; Lin Chrong Jung; King Ya Chin

来源：Journal of Micromechanics and Microengineering, 2009, 19(12): 125023.

DOI：10.1088/0960-1317/19/12/125023

This study proposes an array for a bio-handling system consisting of microcoils on top of photodetectors fabricated by low-temperature polycrystalline-silicon thin-film transistor (LTPS-TFT) technology on a glass substrate. Using magnetic beads as the medium, the proposed system can simultaneously monitor and manipulate micrometer-sized bio-samples. In a manipulation system based on magnetic force, photo-detecting is a reliable method, immune to the interference caused by electromagnetic fields. Under 480 lux ambient white light, the sensor can detect a microbead as small as 23 mu m in diameter with detectable output difference. It provides a new, easier way for handling samples on a small chip.

• 出版日期2009-12
• 单位中国科学院电工研究所; 清华大学