Mechanical microactuators based on nanocrystalline diamond films

作者：Kusterer Joachim^*; Schmid Philipp; Kohn Erhard

来源：New Diamond and Frontier Carbon Technology, 2006, 16(6): 295-321.

• nanocrystalline diamond
• MEMS
• actuators
• integration technologies
• intrinsic stress

Diamond can offer a number of advantages in MEMS structures owing to its outstanding material properties. Furthermore, it is a multifunctional material and can be used as a substitute for a variety of materials such as metals and ceramics, particularly for actuator structures. In this review, microstructures with electromechanical activation are evaluated with emphasis on two questions: firstly, what is the best actuation principle to obtain the full benefit from diamond material properties and secondly, what are the technological possibilities that can be used to develop advanced components based on these activation principles? These features are highlighted by a hybrid fabrication scheme for RF switches. It has already been shown that there is a tool box of technological materials and processing steps that allows the establishment of fabrication routines. Equally, simulation has progressed such that such structures can be designed and optimized, and performance advantages over conventional technologies can be predicted.

• 出版日期2006