Multilayer X-ray mirrors based on La/B4C and La/B9C

作者:Andreev S S*; Barysheva M M; Chkhalo N I; Gusev S A; Pestov A E; Polkovnikov V N; Rogachev D N; Salashchenko N N; Vainer Yu A; Zuev S Yu
来源:Technical Physics, 2010, 55(8): 1168-1174.
DOI:10.1134/S1063784210080153

摘要

Multilayer X-ray mirrors that are based on La/B4C and La/B9C and intended for the reflection of X-ray radiation in the spectral region near lambda = 6.7 nm are prepared and studied. Reflection coefficients at a level of 40-60% are achieved for mirrors with various periods. The difference in the interlayer roughnesses reconstructed from the data measured in the hard and soft X-ray spectral regions is explained using a structural model with an asymmetric permittivity profile in a mirror period. A proximate technique is developed to estimate the permittivity profile in a multilayer-structure period using reflectometry data. The effect of antidiffusion Sn, Cr, and Mo barriers on the reflection coefficient of multilayer La/B4C structures is studied experimentally.

  • 出版日期2010-8