DESIGN OF AN INTEGRATED SCANNING MICROMIRROR DRIVER IN BCD TECHNOLOGY

作者：Saponara Sergio^*; Baldetti Tommaso; Fanucci Luca; Volpi Emilio; D'Ascoli Francesco

来源：Journal of Circuits, Systems, and Computers, 2011, 20(4): 781-799.

DOI：10.1142/S0218126611007608

• Driver IC (integrated circuit)
• MEMS (Micro-Electro-Mechanical-System)
• scanning micromirror
• BCD (Bipolar-CMOS-DMOS)
• mixed-signal circuit

The paper presents the design and characterization of a smart IC driver for MEMS scanning micromirrors. The driver integrates in 0.18 mu m BCD technology the cascade of the following circuits: resistor-string DAC circuitry for direct interface to a host digital processing unit, a voltage buffer between the DAC and the High-Voltage (HV) stage, and a fully-differential HV amplifier with programmable output common mode. A couple of the designed DACs permits to generate, starting from digital samples, low-voltage analog stimuli. This signal amplified up to 25 V by the HV stage provides the electrostatical actuation of the micromirror. When compared to state-of-the-art the driver offers an integrated solution with good dynamic performances.

• 出版日期2011-6